I just went through 3 weeks of trying to figure out my MAF problems too.
Did a search on the forum and found a bunch of posts on cleaning the MAF, either with Isopropal (>91%) or an ELectronic Cleaner. Tried both methods, with my stock chip back in. Never worked, although some posts claimed it can work. I also had problems the day after installing a pre-oiled ITG drop in filter. I think the oil on the filter is contaminating the MAF sensor, which I heard is not a high quality part to begin with. IN the end, nothing seemed to work. I was also getting intermittent boost problems, cylinder misfiring, and low air flow codes. I re-installed the stock paper filter but the 2 cleaning methods still failed to eliminate the boost problems (car was probably going into limp mode). In the end, the dealer replaced my MAF for free under California's 7/70 emission warranty, which I had no idea about until I brought the car in and the dealer told me.